Hexafluoroethane
Grade: 5N
Specifications:47L Cylinder、440L(Y Cylinder)、880L(SY Cylinder)
Detailed Introduction
Application: etching
As a high-performance fluorine-containing electronic gas, high-purity hexafluoroethane is mainly used in high-precision dry etching and cavity cleaning processes in semiconductor processes, and its unique molecular structure shows key advantages in advanced and medium-range processes. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.