Tungsten Hexafluoride
Grade: 6N
Specifications:10L Cylinder、40L Cylinder
Detailed Introduction
Application: thin film
High-purity tungsten hexafluoride is a key precursor material in semiconductor manufacturing, which is mainly used for chemical deposition and atomic layer deposition of tungsten thin films due to its high volatility, moderate decomposition temperature and excellent filling ability, especially in 3D structure. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.