High-Purity Hydrogen Chloride (HCl)
Grade: 6N
Packaging Specifications:47L cylinder, 440L (Y-cylinder), 880L (SY-cylinder), tube trailer
Detailed Introduction
Product Introduction Page: Main Applications: Silicon-based epitaxy process in silicon/compound substrate manufacturing
High-purity hydrogen chloride plays a key role in processes such as surface cleaning of silicon wafers, high-temperature gas-phase etching, etching of third-generation compound semiconductors, doping and etching in chemical vapor deposition, equipment cleaning of silicon-based deposits in CVD or etch reaction chambers, and stripping of photoresist residue in the semiconductor industry. This product features advantages such as ultra-high purity and can meet various customer packaging requirements.