High-Purity Difluoromethane (CH2F2)
Grade: 5N
Packaging Specifications:40L cylinder, 880L cylinder
Detailed Introduction
Product Introduction Page: Main Applications: Etching processes in semiconductor wafer fabrication
As a new-generation fluorine-containing electronic specialty gas with a low global warming potential, high-purity difluoromethane demonstrates unique process advantages in semiconductor manufacturing, especially being irreplaceable in the fields of precision etching and cleaning for 3D NAND in advanced processes. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.