High-purity hydrogen is a key process gas in semiconductor manufacturing due to its excellent reducibility and process compatibility, which is mainly used in chemical vapor deposition processes such as polysilicon deposition and epitaxial growth, annealing processes such as high-temperature annealing and post-metallization annealing, etching processes such as pre-cleaning before tungsten deposition, selective etching of silicon nitride, and reduction reactions such as metal oxide reduction and process chamber cleaning.