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Silicane

Grade: 5N
Specifications:47L Cylinder、440L(Y Cylinder)、Tube
Specifications
Detailed Introduction
Application: thin film
High-purity silane is the most critical silicon source gas in semiconductor manufacturing, and plays a key role in thin film deposition processes such as polysilicon deposition, monocrystalline silicon epitaxy, and amorphous silicon thin films, dielectric layer indicators such as silicon nitride deposition and silicon oxide deposition, and advanced process nodes such as contact hole filling and 3D NAND channel empty polysilicon deposition manufacturing. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.
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