Carbon dioxide
Grade: 5N
Specifications:40L Cylinder
Detailed Introduction
Application: cleaning and etching
High-purity carbon dioxide is a multifunctional process gas and supercritical fluid in semiconductors, which is widely used in supercritical cleaning, dry etching process, wafer cooling and thermal management and deposition process innovation, and advanced packaging process, and has become the core medium for sustainable semiconductor manufacturing. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.