Hexachlorodisilane
Grade: 7N
Specifications:38L Canister
Detailed Introduction
Application: ALD thin film
HCDS is an important silicon source precursor in semiconductor manufacturing, which has a unique dual-silicon structure and shows key advantages in the advanced manufacturing process, mainly used for high-k Changshu material deposition and special thin film preparation process, and is widely used in advanced logic chips and 3D NAND. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.