Bis(diethylamino)silane
Grade: 6N
Specifications:19L Canister
Detailed Introduction
Application: ALD thin film
BDEAS is a novel silicon-based precursor that is used in processes such as semiconductor low dielectric constant deposition and selective thin film growth, and has shown irreplaceable properties in the fields of 3D IC and advanced packaging. This product has the advantages of ultra-high purity, which can meet the requirements of customers for a variety of packaging and cylinder joints.