High-Purity Hexafluoroethane (C2F6)
Grade: 5N
Packaging Specifications:47L cylinder, 440L (Y-cylinder), 880L (SY-cylinder), tube trailer
Detailed Introduction
Product Introduction Page: Main Applications: Etching processes in semiconductor display manufacturing
As a high-performance fluorine-containing electronic gas, high-purity hexafluoroethane is mainly used as a dry etching gas and a chemical vapor deposition chamber cleaning agent in semiconductor display manufacturing. Its excellent etching performance makes it a key material for high-precision display panel manufacturing. This product features advantages such as ultra-high purity and can meet various customer requirements for packaging and cylinder connections.