High-Purity Silane (SiH4)
Grade: 5N
Packaging Specifications:47L cylinder, 440L (Y-cylinder), tube trailer
Detailed Introduction
Product Introduction Page: Main Applications: Film formation processes in semiconductor display manufacturing
High-purity silane is a core specialty gas in semiconductor display manufacturing. It plays an irreplaceable role in key processes such as amorphous silicon channel layer deposition in TFT array manufacturing, silicon nitride insulation layers, low-temperature polysilicon processes, and thin-film encapsulation in OLED display manufacturing. This product features ultra-high purity, low particulate matter, and high precision in concentration control, and can meet various customer packaging requirements.