High-purity silane is the core special gas in semiconductor display, and plays an irreplaceable role in key processes such as amorphous silicon channel layer deposition in TFT array manufacturing, silicon nitride insulation, low-temperature polysilicon process and thin film packaging in OLED display manufacturing. This product has the advantages of ultra-high purity, low particulate matter, controllable concentration and high precision, which can meet a variety of packaging requirements of customers.